文章名称: The Application of TiC and TiN Thick Films by PVD Processes 文章英文名称: The Application of TiC and TiN Thick Films by PVD Processes 关键词: 摘要: 作者: K. Nakamura, Y. Fukube, K. Inagawa and Y. Nozawa 作者单位:
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The Application of TiC and TiN Thick Films by PVD Processes